CLEAN TRACK LITHIUS Pro Z
A 300 mm coater/developer for the 10 nm node and beyond, long used in volume production for advanced lithography, including EUV.
Specifications
| Wafer size | 300 mm |
|---|---|
| Supported nodes | 10 nm node and beyond |
| Throughput | 300 wph inline |
| Supported processes | EUV, immersion, ArF, KrF, i-line, SOC |
| Related models | LITHIUS Pro AP for 300 mm / 200 mm (derivative) |
| Main applications | Resist coating, development and bakes |
Specifications as published by the maker. See the sources below.
Overview
CLEAN TRACK LITHIUS Pro Z is a 300 mm coater/developer from Tokyo Electron (TEL). It coats wafers with resist, develops them after exposure and performs the bakes in between, connected inline to the scanner.
It supports leading-edge lithography at the 10 nm node and below and handles EUV, immersion, ArF, KrF, i-line and SOC (spin-on carbon) processes. Throughput is 300 wph inline. A low-particle transfer system and a design that does not touch the wafer bevel help reduce defects.
The LITHIUS series builds on the CLEAN TRACK ACT series, which held a large market share. It also includes LITHIUS Pro DICE for EUV, including high-NA EUV (440 wph inline), and LITHIUS Pro AP for packaging.
Key features
- Supports leading-edge lithography at the 10 nm node and below
- EUV, immersion, ArF, KrF, i-line and SOC processes
- Throughput of 300 wph inline
- Low-particle transfer with no contact on the wafer bevel
Applications
- Resist coating, development and bakes in EUV and immersion lithography
- Coating of underlayers such as SOC (spin-on carbon)
FAQ
What is the difference between LITHIUS Pro Z and LITHIUS Pro DICE?
Pro DICE supports EUV processes including high-NA, runs at 440 wph inline and adds stronger defect control and tool data collection. Pro Z targets the 10 nm node and below at 300 wph inline.
Other coater/developers
- DT-3000 (SOKUDO DUO) · SCREEN Holdings
- RF-200EX / RF-300EX · SCREEN Holdings
- SC-80EX · SCREEN Holdings
- SK-60EX / SK-80EX · SCREEN Holdings
- CLEAN TRACK™ LITHIUS Pro™ · Tokyo Electron (TEL)
- CLEAN TRACK™ LITHIUS Pro™ AP · Tokyo Electron (TEL)
- CLEAN TRACK LITHIUS Pro DICE · Tokyo Electron (TEL)
- CLEAN TRACK™ LITHIUS Pro™ V · Tokyo Electron (TEL)
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Sources
Last updated: October 23, 2026