Nissin Ion Equipment
A Japanese maker of ion implanters, including medium-current implanters and high-temperature implanters for SiC power devices.
日新イオン機器・Equipment・Last updated: October 23, 2026
Overview
Nissin Ion Equipment makes the EXCEED series of medium-current ion implanters, which started with EXCEED2000 in 1994. EXCEED3000AH is the 300 mm model, with beam angle feedback in both directions and average auto-tune under 2 minutes.
IMPHEAT-II implants SiC wafers at temperatures from room temperature to 500 °C, with about 4 times the beam current and about 3 times the production capacity of the previous IMPHEAT.
Business: Ion implanters
Why it matters
Hot implantation is a step specific to SiC power devices, where room-temperature implants leave crystal damage.
Main products
- •Medium-current ion implanters (EXCEED3000AH)
- •High-temperature ion implanters for SiC (IMPHEAT-II)
Products (2)
- EXCEED3000AH · Medium-current ion implanters
- IMPHEAT-II · SiC power semiconductor equipment