Sumitomo Heavy Industries Ion Technology
A Sumitomo Heavy Industries group maker of ion implanters covering high-current, medium-current and high-energy implantation.
住友重機械イオンテクノロジー・Equipment・Last updated: October 23, 2026
Overview
Sumitomo Heavy Industries Ion Technology makes single-wafer ion implanters in all three main classes. SHX-Ⅲ/HC is a high-current implanter for 0.2 to 60 keV that combines beam scanning with mechanical scanning; MC3-Ⅱ/MC is a medium-current implanter for 3 to 960 keV.
S-UHE and SS-UHE Ⅱ are high-energy implanters with multi-stage RF linac acceleration, reaching 6.8 MeV and up to 14.4 MeV, used for image sensors and triple-well formation.
Business: Ion implanters
Why it matters
Covering high-current, medium-current and high-energy implantation lets one supplier serve every class of implant step.
Main products
- •High-current ion implanters (SHX-Ⅲ/HC)
- •Medium-current ion implanters (MC3-Ⅱ/MC)
- •High-energy ion implanters (S-UHE, SS-UHE Ⅱ)
Products (3)
- MC3-Ⅱ(MC) · Medium-current ion implanters
- S-UHE / SS-UHE Ⅱ · High-energy ion implanters
- SHX-Ⅲ(HC) · High-current ion implanters