SICA88
A SiC wafer defect inspection and review system that detects basal plane dislocations (BPD) and stacking faults (SF) inside the epitaxial layer along with surface defects.
Maker: Lasertec · Official product page
Specifications
| Inspection target | SiC wafers and epitaxial wafers |
|---|---|
| Detected defects | Epitaxial defects, scratches, BPD, stacking faults (automatic classification) |
| Related models | SICA108 (successor with renewed inspection optics) |
| Main applications | Outgoing and incoming inspection of SiC wafers, epitaxial process control |
Specifications as published by the maker. See the sources below.
Overview
SICA88 is Lasertec's SiC wafer defect inspection and review system. It performs surface inspection and photoluminescence (PL) inspection of φ6-inch SiC wafers and epitaxial wafers.
Besides surface defects, it sensitively detects crystal defects such as basal plane dislocations (BPD) and stacking faults (SF). It captures high-resolution review images and classifies defects in detail with automatic defect classification (ADC), so re-inspection under a microscope is not needed. Full-wafer inspection throughput is 10 wafers per hour.
In SiC power devices, crystal defects determine device reliability, so wafer quality control is important. SICA88 is used for outgoing and incoming inspection of SiC wafers and epitaxial wafers, for process control of epitaxial growth and polishing, and for process control in device manufacturing. It received an excellence award in the Semiconductor of the Year 2016 by the Electronic Device Industry News.
Key features
- Surface inspection + photoluminescence (PL) inspection
- Sensitive detection of crystal defects such as BPD and SF
- High-resolution review images and automatic defect classification (ADC)
- 10 wafers per hour for full-wafer inspection
Applications
- Outgoing and incoming inspection of SiC wafers and epitaxial wafers
- Process control of SiC epitaxial growth, polishing and device manufacturing
Other crystal defect inspection equipment
All crystal defect inspection equipment and Japanese suppliers
More from Lasertec
- ABICS E120 · Mask inspection equipment
- ABICS E320 · Mask inspection equipment
- ACTIS A150 · Mask inspection equipment
- ACTIS A200HiT series · Mask inspection equipment
- ACTIS A300 series · Mask inspection equipment
- BASIC series · Mask inspection equipment
- BGM300 · TSV formation equipment
- BIM300 · Surface profilers
Sources
Crystal defect inspection equipment
Last updated: October 23, 2026