Crystal defect inspection equipment
Crystal defect inspection equipment finds defects in the crystal itself, such as dislocations and stacking faults, rather than particles or pattern defects on the surface. It is especially important for SiC and GaN wafers, where crystal defects directly affect the reliability of power and RF devices.
What it does
Typical methods combine surface inspection with photoluminescence imaging, which reveals defects inside the epitaxial layer without destroying the wafer.
Products (3)
- GALOIS211 · Lasertec
A GaN wafer defect inspection and review system that quickly detects various defects on GaN wafers and observes them at high resolution.
- SICA108 · Lasertec
A SiC wafer defect inspection and review system focused on SiC-specific defects that runs surface and photoluminescence inspection simultaneously at high speed.
- SICA88 · Lasertec
A SiC wafer defect inspection and review system that detects basal plane dislocations (BPD) and stacking faults (SF) inside the epitaxial layer along with surface defects.
Japanese makers in this category
- Lasertec · 3 product(s) listed
Other front-end equipment
Sources
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Japanese equipment by category
Last updated: October 23, 2026