WS-620C / WS-820C / WS-820L
A high-throughput batch cleaning system with a freely configurable line layout. It comes in two transfer types: carrier and carrierless.
Maker: SCREEN Holdings · Official product page
Specifications
| Type | Batch wet cleaning |
|---|---|
| Wafer size | 150 mm (WS-620C), 200 mm (WS-820C / 820L) |
| Configuration | Up to 13 process tanks, up to 6 transfer robots |
Specifications as published by the maker. See the sources below.
Overview
WS-620C/WS-820C/WS-820L are SCREEN's batch cleaning systems (wet stations). They are high-throughput tools with flexibly configurable line layouts.
There are two transfer types: WS-620C (for 150 mm) and WS-820C (for 200 mm), which transfer and process wafers in their carriers, and WS-820L (for 200 mm), which transfers wafers without carriers. The system can be configured freely for its purpose, with up to 13 process tanks.
Multiple tanks and up to 6 transfer robots give high throughput. Optimized process tanks, strict chemical control and a clean drying section provide stable, high-quality processing. WS-820L can carry a reduced-pressure dryer for clean drying with fewer watermarks.
Key features
- Carrier or carrierless transfer
- Freely configurable with up to 13 tanks
- Up to 6 transfer robots
- Reduced-pressure drying suppresses watermarks (WS-820L)
Applications
- Batch cleaning on 150/200 mm lines
Other batch wafer cleaning equipment
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Sources
Batch wafer cleaning equipment
Last updated: October 23, 2026