SpeedFam
A Japanese maker of wafer edge polishers and double-sided lapping and polishing machines for silicon and other substrates.
スピードファム・Equipment・Last updated: October 23, 2026
Overview
SpeedFam makes polishing equipment for wafer manufacturing. The EP-300-X edge polisher mirror-polishes the edge, notch and orientation flat of 300 mm silicon wafers; SpeedFam has shipped about 600 edge polishers since 1988.
The DSM series are double-sided lapping and polishing machines for silicon wafers up to 300 mm, SiC, quartz, ceramics and magnetic disk substrates.
Business: Wafer polishing and lapping equipment
Why it matters
Edge polishing prevents chipping and particles that would otherwise cause wafer breakage and yield loss later.
Main products
- •Edge polishers (EP-300-X)
- •Double-sided lapping and polishing machines (DSM series)
Products (2)
- DSM series · Double-side polishers (DSP)
- EP-300-X · Wafer edge polishers