SS-80EX
A spin scrubber that carries on the stability of the SS series. Up to 160 wafers per hour with 2 to 6 spin heads.
Maker: SCREEN Holdings · Official product page
Specifications
| Capacity | Up to 160 wafers per hour (111% of the current model) |
|---|---|
| Configuration | 2 to 6 spin heads |
| Key feature | Separated chamber design, 6 types of cleaning tools |
Specifications as published by the maker. See the sources below.
Overview
SS-80EX is SCREEN's spin scrubber. It carries on the stability and reliability of the well-proven SS series and adds further functions.
It processes up to 160 wafers per hour (111% of SCREEN's current model). The control system has been renewed, with a dedicated screen for intuitive operation.
SCREEN's own separated chamber design allows brushes and pins to be replaced and cups cleaned in a stopped chamber while the other chambers keep running, greatly reducing downtime. It can carry 6 types of cleaning tools, and bevel cleaning in particular is effective for improving yield. From 2 up to 6 spin heads can be installed.
Key features
- Up to 160 wafers per hour
- Separated chamber design
- 6 types of cleaning tools
- 2 to 6 spin heads
Applications
- Brush cleaning and bevel cleaning of wafers
Other wafer scrubbers
- SB-3300 · SCREEN Holdings
- SS-3200 · SCREEN Holdings
- SS-3300S · SCREEN Holdings
- CELLESTA™ MS2 · Tokyo Electron (TEL)
- NS300Z · Tokyo Electron (TEL)
More from SCREEN Holdings
- CW-2000 · Batch wafer cleaning equipment
- DR-8000 · Mask dimension and flatness metrology
- DT-3000 (SOKUDO DUO) · Coater/developers
- DW-3100 · Laser direct imaging systems
- FC-3100 · Batch wafer cleaning equipment
- FC-821L · Batch wafer cleaning equipment
- LA-3100 · Laser annealing equipment
- RE-3500 · Ellipsometers
Sources
Wafer scrubbers
Last updated: October 23, 2026