VM-1200 / VM-1300
A tabletop optical interference film thickness measurement system that can also be used on production lines. It measures stacks of up to 4 layers at once.
Maker: SCREEN Holdings · Official product page
Specifications
| Type | Optical interference (CCD spectrometer) |
|---|---|
| Measured films | 25 film types as standard |
| Stacked films | Up to 4 layers measured at once |
Specifications as published by the maker. See the sources below.
Overview
VM-1200/VM-1300 are SCREEN's tabletop optical interference film thickness measurement systems. They can also be installed on production lines.
A CCD image sensor in the spectrometer measures the whole visible wavelength range at once, giving fast, accurate film thickness measurement. A recipe wizard makes even complex recipes easy to create, and the number of recipes that can be stored has greatly increased.
Detailed data processing is possible, including 3D mapping of measurement data, correction of thickness values, histograms and statistical calculations. An auto stage and autofocus allow automatic measurement, and 25 film types are supported as standard for thickness and spectral reflectance measurement. Stacks of up to 4 layers can be measured at once.
Key features
- Whole-wavelength measurement with a CCD spectrometer
- 25 film types as standard
- Stacks of up to 4 layers
- Automatic measurement
Applications
- Film thickness control on production lines
Other film thickness metrology
- VM-1020 · SCREEN Holdings
- VM-2500 / VM-3500 · SCREEN Holdings
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Sources
Film thickness metrology
Last updated: October 23, 2026