i-line steppers

FPA-5550iZ2

Name: FPA-5550iZ2
Brand: Canon

Canon's i-line stepper for the front end. It offers productivity and overlay accuracy among the best for i-line tools and handles 200 and 300 mm wafers.

Maker: Canon · Official product page

Specifications

Light source	i-line (365 nm)
Numerical aperture (NA)	0.57 to 0.45 (automatically variable)
Resolution	350 nm or less
Overlay accuracy	SMO 18 nm or less, MMO 25 nm or less (with options)
Wafer size	200 / 300 mm (selectable)
Related models	FPA-5550iZ (previous model; about 20% higher throughput)

Specifications as published by the maker. See the sources below.

Overview

FPA-5550iZ2 is Canon's i-line stepper for the front end. It offers productivity and overlay accuracy among the best for i-line tools, and either 200 mm or 300 mm wafers can be chosen.

Resolution is 350 nm or less, NA is automatically variable from 0.57 to 0.45, the reduction ratio is 1:4 and the field size is 26 × 33 mm. Overlay accuracy is SMO (single machine) 18 nm or less and MMO 25 nm or less (with options).

Optimized alignment, exposure and wafer transfer sequences shorten wafer processing time, and faster measurement and calibration shorten lot change time. Throughput is about 20% higher than the first unit of the earlier FPA-5550iZ.

Key features

i-line, resolution of 350 nm or less, 26 × 33 mm field
Overlay of SMO 18 nm or less and MMO 25 nm or less
Sequence optimization raises throughput by about 20% over FPA-5550iZ
Supports 200/300 mm wafers

Applications

Non-critical layers of logic and memory
Volume production of image sensors, power devices and others

Other i-line steppers

FPA-3030i5a · Canon
FPA-3030i6 · Canon
FPA-3030iWa · Canon
FPA-5550iX · Canon
NSR-2205iL1 · Nikon
NSR-SF155 · Nikon

All i-line steppers and Japanese suppliers

Sources

Canon: FPA-5550iZ2 product page