FPA-3030EX6
Canon's KrF stepper for IoT-related devices. It handles a variety of 100 to 200 mm substrates and shares its wafer transfer system with the FPA-3030i5+ i-line stepper.
Maker: Canon · Official product page
Specifications
| Light source | KrF (248 nm) |
|---|---|
| Numerical aperture (NA) | 0.65 to 0.50 (automatically variable) |
| Resolution | 150 nm or less |
| Throughput | 121 wafers per hour or more |
| Overlay accuracy | 25 nm or less |
| Wafer size | 100 / 125 / 150 / 200 mm (selectable) |
Specifications as published by the maker. See the sources below.
Overview
FPA-3030EX6 is Canon's KrF stepper for IoT-related devices. The exposure wavelength is 248 nm (KrF), the reduction ratio 1:5 and the reticle 6 inch. Resolution is 150 nm or less, which Canon describes as top-level performance for a KrF excimer laser stepper in its class.
NA is automatically variable from 0.65 to 0.50, the field size is 22 × 22 mm, overlay accuracy is 25 nm or less and productivity is 121 wafers per hour or more. Wafer size can be chosen from 100, 125, 150 and 200 mm.
It keeps the performance of the earlier FPA-3000EX6 and adds the wafer transfer system shared with the proven FPA-3030i5+ i-line stepper, allowing it to transfer substrates of many materials, diameters and thicknesses. It is suited to manufacturing IoT devices, which involve many product types on small-diameter lines.
Key features
- KrF (248 nm), resolution of 150 nm or less
- NA automatically variable from 0.65 to 0.50
- 121 wafers per hour or more, overlay of 25 nm or less
- Transfer system for a variety of 100 to 200 mm substrates
Applications
- IoT-related devices (sensors, analog, power and others)
- KrF exposure on small-diameter lines
Other duv lithography systems
- FPA-6300ES6a · Canon
- FPA-6300ESW · Canon
- NSR-S215D · Nikon
- NSR-S220D · Nikon
- NSR-S322F · Nikon
- NSR-S333F · Nikon
- NSR-S625E · Nikon
- NSR-S635E · Nikon
More from Canon
- FPA-1200NZ2C · Nanoimprint lithography (NIL)
- FPA-3030i5a · i-line steppers
- FPA-3030i6 · i-line steppers
- FPA-3030iWa · i-line steppers
- FPA-5520iV · Wafer-level packaging equipment
- FPA-5550iX · i-line steppers
- FPA-5550iZ2 · i-line steppers
- FPA-8000iW · Wafer-level packaging equipment
Sources
Last updated: October 23, 2026