FPA-6300ESW
The only KrF scanner in the world that can expose 33 × 42.2 mm in one shot, exposing full-size CMOS sensors without stitching.
Maker: Canon · Official product page
Specifications
| Light source and resolution | KrF 248 nm, 130 nm or less |
|---|---|
| Field size and reduction ratio | 33 × 42.2 mm, 1:3.125 |
| Overlay accuracy | 9 nm or less |
Specifications as published by the maker. See the sources below.
Overview
FPA-6300ESW is Canon's wide-field, high-productivity KrF scanner. Changing the projection magnification from 1:4 to 1:3.125 enlarges the field while keeping a 6-inch reticle.
Because it exposes 33 mm × 42.2 mm in one shot, it is the only KrF scanner in the world that can expose full-size CMOS image sensors without stitching, which joins two or more exposure areas.
It fully reuses the platform of the proven FPA-6300ES6a, achieving the same uptime and reliability. Resolution is 130 nm or less, NA is automatically variable from 0.45 to 0.70, overlay accuracy is 9 nm or less, and it handles 300 mm wafers.
Key features
- One-shot exposure of 33 × 42.2 mm
- The only KrF scanner that needs no stitching
- FPA-6300ES6a platform
Applications
- Exposure of full-size CMOS image sensors
Other duv lithography systems
- FPA-3030EX6 · Canon
- FPA-6300ES6a · Canon
- NSR-S215D · Nikon
- NSR-S220D · Nikon
- NSR-S322F · Nikon
- NSR-S333F · Nikon
- NSR-S625E · Nikon
- NSR-S635E · Nikon
More from Canon
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- FPA-3030i5a · i-line steppers
- FPA-3030i6 · i-line steppers
- FPA-3030iWa · i-line steppers
- FPA-5520iV · Wafer-level packaging equipment
- FPA-5550iX · i-line steppers
- FPA-5550iZ2 · i-line steppers
- FPA-8000iW · Wafer-level packaging equipment
Sources
Last updated: October 23, 2026