MPM193 series
The industry-standard phase shift measurement system for ArF. It measures phase difference and transmittance directly at 193 nm, the same wavelength as exposure.
Maker: Lasertec · Official product page
Specifications
| Measurement wavelength | 193 nm (ArF) |
|---|---|
| Repeatability (MPM193EX) | Phase 0.2°, transmittance 0.04% (3σ) |
| Lineup | MPM193Ⅱ (lamp light source), MPM193EX (laser light source) |
Specifications as published by the maker. See the sources below.
Overview
The MPM193 series is Lasertec's phase and transmittance measurement system. It is the phase shift measurement system for ArF (193 nm) that has become the industry standard.
It measures phase shift directly at the same wavelength as the exposure tool and can also measure the transmittance of halftone phase shift masks. It is highly stable against floor vibration and air turbulence inside the tool.
MPM193Ⅱ, with a lamp light source, has measurement repeatability of 0.5° in phase and 0.2% in transmittance (3σ), and MPM193EX, with a laser light source, has 0.2° in phase and 0.04% in transmittance (3σ).
Key features
- Direct measurement at 193 nm, the same as exposure
- Measures phase and transmittance
- High measurement repeatability
Applications
- Phase and transmittance measurement of phase shift masks
Other mask dimension and flatness metrology
- MASK CD-SEM E3660 · Advantest
- MASK MVM-SEM® E3640 · Advantest
- MASK MVM-SEM® E3650 · Advantest
- MPM248 · Lasertec
- DR-8000 · SCREEN Holdings
All mask dimension and flatness metrology and Japanese suppliers
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Sources
Mask dimension and flatness metrology
Last updated: October 23, 2026