MPM248
The industry-standard phase shift measurement system for KrF. It measures phase difference and transmittance at 248 nm.
Maker: Lasertec · Official product page
Specifications
| Measurement wavelength | 248 nm (KrF) |
|---|---|
| Repeatability | Phase 0.5°, transmittance 0.2% (3σ) |
| Substrate | 6025 |
Specifications as published by the maker. See the sources below.
Overview
MPM248 is Lasertec's phase shift measurement system. It is the system for KrF (248 nm) that has become the industry standard.
It measures phase shift directly at the same wavelength as the stepper exposure and can also measure the transmittance of halftone phase shift masks. It is highly stable against floor vibration and air turbulence inside the tool.
It handles 6025-size substrates, with measurement repeatability of 0.5° in phase and 0.2% in transmittance (3σ).
Key features
- Direct measurement at 248 nm, the same as exposure
- Measures phase and transmittance
Applications
- Measurement of phase shift masks for KrF
Other mask dimension and flatness metrology
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- MASK MVM-SEM® E3650 · Advantest
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- DR-8000 · SCREEN Holdings
All mask dimension and flatness metrology and Japanese suppliers
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Sources
Mask dimension and flatness metrology
Last updated: October 23, 2026