VM-1020
A microscope-type optical interference film thickness measurement system suited to R&D. Users can register their own film types.
Maker: SCREEN Holdings · Official product page
Specifications
| Type | Microscope + fiber-input CCD spectrometer |
|---|---|
| Measured films | 25 types (29 types for the UV model) |
| Functions | Simultaneous measurement of stacks (up to 4 layers), etch rate calculation |
Specifications as published by the maker. See the sources below.
Overview
VM-1020 is SCREEN's microscope-type optical interference film thickness measurement system, suited to R&D. It consists of a microscope section, made up of a lens barrel, manual XY stage, motorized revolver, objective lenses, filter slot and light source, and a fiber-input CCD spectrometer.
It measures light reflected from the sample surface across the whole visible wavelength range at once, giving fast, accurate thickness measurement. With the recipe wizard, anyone can create recipes easily.
Besides the 25 standard film types (29 types for the UV model), users can register the optical constants (refractive index, extinction coefficient) of films and substrates to create their own measurement programs. It can also measure spectral reflectance, produce 3D maps, measure stacks of up to 4 layers at once and calculate etch rates.
Key features
- Microscope type
- User registration of film types
- Stacks of up to 4 layers
- Etch rate calculation
Applications
- Film thickness measurement in R&D
Other film thickness metrology
- VM-1200 / VM-1300 · SCREEN Holdings
- VM-2500 / VM-3500 · SCREEN Holdings
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Sources
Film thickness metrology
Last updated: October 23, 2026