NanoProber® NP8000
A nano-device characterization system that lands probes tens of nanometers wide on devices under SEM observation to measure transistor electrical characteristics. It is designed for the 5 nm node and beyond.
Maker: Hitachi High-Tech · Official product page
Specifications
| Analysis technique | Nanoprobing (electrical characteristics, EBAC, EBIC, pulsed IV) |
|---|---|
| Target | Transistors and wiring (5 nm node and beyond) |
| Key feature | High-resolution observation at low accelerating voltage with a Schottky electron gun and deceleration |
| Main applications | Electrical identification of defective transistors |
Specifications as published by the maker. See the sources below.
Overview
NP8000 is Hitachi High-Tech's SEM-based nanoprobing system. Designed for analysis at the 5 nm node and beyond, it can evaluate the electrical characteristics of nanoscale devices, EBAC, EBIC, pulsed IV and temperature dependence.
New electron optics and a new Schottky electron gun give clear images even at ultra-low accelerating voltages below 100 V, reducing sample damage during observation. It has 8 probes, and higher probe current improves the quality of EBAC (electron beam absorbed current) images. DI-EBAC, which visualizes defects by applying voltage, has also been strengthened, making low-resistance defects that were previously hard to find easier to locate.
A temperature-controlled stage allows temperature-dependent characterization, and optical cameras that view the top and side at once assist coarse probing. It also has a sub-stage that moves the sample independently of the probes and a load lock chamber for probe exchange, and supports pulsed IV measurement (custom order) to diagnose resistive gate electrode failures.
Key features
- For the 5 nm node and beyond, 8 probes
- Clear images at ultra-low accelerating voltages below 100 V
- EBAC, DI-EBAC, EBIC and pulsed IV
- Temperature-controlled stage and load lock for probe exchange
Applications
- Electrical characterization of transistors in advanced devices
- Locating failures such as low-resistance defects
Other failure analysis equipment
- PHEMOS-X emission microscope C15765-01 · Hamamatsu Photonics
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Sources
Last updated: October 23, 2026