SU-2000
A cost-conscious single-wafer cleaning system for green devices such as power semiconductors and MEMS, inheriting technology from the high-end SU-3200.
Maker: SCREEN Holdings · Official product page
Specifications
| Type | Single-wafer cleaning |
|---|---|
| Configuration | 2 or 4 chambers |
| Key feature | Thin wafer support, all-in-one configuration |
Specifications as published by the maker. See the sources below.
Overview
SU-2000 is SCREEN's single-wafer cleaning system. It was developed for manufacturing green devices such as power semiconductors used in inverters for air conditioners, trains and electric vehicles, as well as MEMS and BSI sensors.
It inherits the basic design and know-how of the high-end SU-3200, supporting advanced process performance while improving cost performance. It flexibly handles everything from standard silicon wafers to thin wafers.
2-chamber and 4-chamber versions can be chosen according to production scale. Even the 4-chamber version can replace an earlier 2-chamber tool with only a 14% increase in size. An all-in-one design with the chemical supply system at the back of the tool keeps the footprint small and improves process control.
Key features
- Inherits SU-3200 technology
- Supports thin wafers
- 2- or 4-chamber versions
- All-in-one configuration
Applications
- Cleaning of power semiconductors and MEMS
- Cleaning of TSV and BSI sensors
Other single-wafer cleaning equipment
- SU-3300 · SCREEN Holdings
- CELLESTA™-i · Tokyo Electron (TEL)
- CELLESTA™-i MD · Tokyo Electron (TEL)
More from SCREEN Holdings
- CW-2000 · Batch wafer cleaning equipment
- DR-8000 · Mask dimension and flatness metrology
- DT-3000 (SOKUDO DUO) · Coater/developers
- DW-3100 · Laser direct imaging systems
- FC-3100 · Batch wafer cleaning equipment
- FC-821L · Batch wafer cleaning equipment
- LA-3100 · Laser annealing equipment
- RE-3500 · Ellipsometers
Sources
Single-wafer cleaning equipment
Last updated: October 23, 2026