MAGICS M9750 / M9751

Specifications

Specifications as published by the maker. See the sources below.

Overview

MAGICS M9750/M9751 is Lasertec's mask blank defect inspection and review system for next-generation EUV mask blanks, announced in December 2025.

It combines the high detection sensitivity needed to inspect high-quality EUV mask blanks for next-generation semiconductors with high throughput suited to outgoing and incoming inspection in volume production. Based on the core technology of the industry-standard MAGICS, it has completely renewed inspection optics and uses high-speed inspection circuit technology developed for mask pattern inspection systems.

Detection sensitivity is greatly improved for substrates and for each layer of leading-edge mask blanks, allowing high-quality blanks to be selected. It outputs the accurate defect coordinates needed for defect mitigation in EUV mask manufacturing. M9751 supports inspection of line-and-space monitor patterns and can be used for process control at mask shops.

Key features

• High sensitivity together with high throughput
• Accurate defect coordinates
• M9751 supports monitor pattern inspection

Applications

• Outgoing and incoming inspection of EUV mask blanks

Other mask inspection equipment

• MASK DR-SEM E5620 · Advantest
• ABICS E120 · Lasertec
• ABICS E320 · Lasertec
• ACTIS A150 · Lasertec
• ACTIS A200HiT series · Lasertec
• ACTIS A300 series · Lasertec
• BASIC series · Lasertec
• MAGICS M6750 / M6751 · Lasertec

All mask inspection equipment and Japanese suppliers

More from Lasertec

• BGM300 · TSV formation equipment
• BIM300 · Surface profilers
• CIEL series · Macro inspection equipment
• CIRIUS series · Defect inspection equipment
• EZ300 · Macro inspection equipment
• GALOIS211 · Crystal defect inspection equipment
• LX series · Macro inspection equipment
• MAGICS M5640 · Wafer substrate inspection equipment

Sources

1. Lasertec: MAGICS M9750 / M9751 product page

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