MAGICS M6750 / M6751
A mask blank defect inspection and review system with higher sensitivity to defects on resist. It scans with 63 beams.
Maker: Lasertec · Official product page
Specifications
| Type | Confocal optics, 63-beam multi-beam scanning |
|---|---|
| Target | Resist-coated blanks, Cr / MoSi / halftone films |
| Functions | M6751 supports particle inspection on latent image patterns after writing and baking |
Specifications as published by the maker. See the sources below.
Overview
MAGICS M6750/M6751 is Lasertec's mask blank defect inspection and review system. It offers higher detection sensitivity for defects on resist.
Based on the 63-beam multi-beam scanning with confocal optics that is the core technology of MAGICS, the industry-standard mask blank inspection system, it has a high-S/N defect detection circuit optimized for defects on resist. Finding defects on resist with high sensitivity allows faster process improvement.
It can inspect resist-coated mask blanks, substrates, Cr films, MoSi films and halftone films. Besides line-and-space pattern inspection, M6751 also supports particle inspection on latent image patterns after writing and baking.
Key features
- 63-beam multi-beam scanning
- Optimized for defects on resist
- Particle inspection on latent image patterns (M6751)
Applications
- Inspection of resist-coated blanks
Other mask inspection equipment
- MASK DR-SEM E5620 · Advantest
- ABICS E120 · Lasertec
- ABICS E320 · Lasertec
- ACTIS A150 · Lasertec
- ACTIS A200HiT series · Lasertec
- ACTIS A300 series · Lasertec
- BASIC series · Lasertec
- MAGICS M9650 / M9651 · Lasertec
More from Lasertec
- BGM300 · TSV formation equipment
- BIM300 · Surface profilers
- CIEL series · Macro inspection equipment
- CIRIUS series · Defect inspection equipment
- EZ300 · Macro inspection equipment
- GALOIS211 · Crystal defect inspection equipment
- LX series · Macro inspection equipment
- MAGICS M5640 · Wafer substrate inspection equipment
Sources
Last updated: October 23, 2026