MAGICS M9650 / M9651

Specifications

Specifications as published by the maker. See the sources below.

Overview

MAGICS M9650/M9651 is Lasertec's defect inspection and review system for EUV mask blanks, announced in November 2018.

It combines the high detection sensitivity needed to inspect next-generation high-quality mask blanks with high throughput suited to outgoing and incoming inspection in volume production. Based on the core technology of MAGICS, the industry-standard mask blank inspection system, it has completely renewed inspection optics and uses high-speed inspection circuit technology developed for mask pattern inspection systems.

Detection sensitivity is greatly improved not only for substrates but also for each layer of leading-edge mask blanks. It handles everything from multi-stage cassettes for blank makers to RSP and MRP for mask shops and Dual Pods for EUVL. M9651 supports inspection of line-and-space monitor patterns.

Key features

• Technology from the industry-standard MAGICS
• High sensitivity and high throughput
• Supports many types of cassettes

Applications

• Inspection of EUV and optical mask blanks

Other mask inspection equipment

• MASK DR-SEM E5620 · Advantest
• ABICS E120 · Lasertec
• ABICS E320 · Lasertec
• ACTIS A150 · Lasertec
• ACTIS A200HiT series · Lasertec
• ACTIS A300 series · Lasertec
• BASIC series · Lasertec
• MAGICS M6750 / M6751 · Lasertec

All mask inspection equipment and Japanese suppliers

More from Lasertec

• BGM300 · TSV formation equipment
• BIM300 · Surface profilers
• CIEL series · Macro inspection equipment
• CIRIUS series · Defect inspection equipment
• EZ300 · Macro inspection equipment
• GALOIS211 · Crystal defect inspection equipment
• LX series · Macro inspection equipment
• MAGICS M5640 · Wafer substrate inspection equipment

Sources

1. Lasertec: MAGICS M9650 / M9651 product page

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