MATRICS X8ULTRA series
A mask inspection system for both EUV masks without pellicles and DUV masks. It offers mask-to-mask comparison inspection.
Maker: Lasertec · Official product page
Specifications
| Optics | 45 nm pixels, 213 nm QCW laser (over 400 mW), two types of polarized illumination |
|---|---|
| Target | EUV masks without pellicles, DUV masks |
| Functions | Mask-to-mask comparison (MtM), fully automatic inspection linked to OHT |
Specifications as published by the maker. See the sources below.
Overview
The MATRICS X8ULTRA series is Lasertec's mask inspection system. It handles both EUV masks without pellicles and DUV masks.
A 45 nm pixel size, a high-power 213 nm QCW laser of more than 400 mW and two types of polarized illumination improve particle detection. It has mask-to-mask comparison inspection (MtM), which stores full images of the initial mask pattern and detects particles on the mask by comparing them with the pattern after exposure.
It supports Dual Pods for EUV masks and RSP150 and RSP200 for photomasks, allowing fully automatic inspection linked to overhead hoist transport (OHT). The stage and electrical rack are integrated, reducing footprint.
Key features
- Supports both EUV and DUV masks
- 45 nm pixels and 213 nm QCW laser
- Mask-to-mask comparison inspection
- Fully automatic inspection linked to OHT
Applications
- Mask quality checks at fabs
- Pre-shipment mask inspection
Other mask inspection equipment
- MASK DR-SEM E5620 · Advantest
- ABICS E120 · Lasertec
- ABICS E320 · Lasertec
- ACTIS A150 · Lasertec
- ACTIS A200HiT series · Lasertec
- ACTIS A300 series · Lasertec
- BASIC series · Lasertec
- MAGICS M6750 / M6751 · Lasertec
More from Lasertec
- BGM300 · TSV formation equipment
- BIM300 · Surface profilers
- CIEL series · Macro inspection equipment
- CIRIUS series · Defect inspection equipment
- EZ300 · Macro inspection equipment
- GALOIS211 · Crystal defect inspection equipment
- LX series · Macro inspection equipment
- MAGICS M5640 · Wafer substrate inspection equipment
Sources
Last updated: October 23, 2026