ENTRON-EXX
ULVAC's multi-chamber deposition system. The successor to ENTRON-EX W300, it carries up to 12 PVD, pre-clean, heating and cooling modules.
Maker: ULVAC · Official product page
Specifications
| Type | PVD multi-chamber (Single / Tandem) |
|---|---|
| Chamber configuration | Up to 12 modules |
| Main applications | Wiring and electrode films for logic, DRAM, NAND and next-generation non-volatile memory |
Specifications as published by the maker. See the sources below.
Overview
ENTRON-EXX is ULVAC's multi-chamber deposition system for semiconductors. ULVAC began taking orders in December 2024 for it as the successor to ENTRON-EX W300, which was launched in 2005 and widely adopted. It keeps the productivity and flexibility of the previous model while strengthening data use and extensibility.
Process modules such as PVD, pre-clean, heating and cooling can be combined, with up to 12 modules installed. There are two platforms, Single with one transfer chamber (Core) and Tandem with two connected in series, chosen according to fab space and required productivity.
The design allows modules to be added or swapped quickly to meet changing requirements. Data collection and analysis functions that process large amounts of data in real time support yield improvement and preventive maintenance.
Key features
- Up to 12 PVD, pre-clean, heating and cooling modules
- Two platforms: Single and Tandem
- Easy addition and replacement of modules
- Data collection and analysis supporting yield improvement and preventive maintenance
Applications
- Wiring and electrode films for logic, DRAM, NAND and next-generation non-volatile memory
- Deposition of patterning masks and functional films
- Sputter deposition in packaging processes
Also listed under: Sputtering equipment
Other pvd equipment
- EXIM™ · Tokyo Electron (TEL)
- LEXIA™-EX · Tokyo Electron (TEL)
- ENTRON-EX W300 · ULVAC
More from ULVAC
- CC-200 · PECVD equipment
- CCMT-D series · Vacuum gauges
- CME · PECVD equipment
- CME-200E · CVD equipment
- CS · Sputtering equipment
- ei-5 · Vacuum evaporation equipment
- ei-5 / EVD-600LP · Vacuum evaporation equipment
- H83 / H84 · Diffusion furnaces
Sources
PVD equipment
Last updated: October 23, 2026