MATRICS X712 series
A mask defect inspection system for mature nodes with Die-to-Database, Die-to-Die and Single Die inspection modes.
Maker: Lasertec · Official product page
Specifications
| Inspection modes | DDB (Die-to-Database), DD (Die-to-Die), SD (Single Die) |
|---|---|
| Target | Masks for mature process nodes |
| Announced | March 2026 |
Specifications as published by the maker. See the sources below.
Overview
The MATRICS X712 series is Lasertec's mask defect inspection system for mature nodes, announced in March 2026.
It has DDB (Die-to-Database) inspection, which compares the mask pattern with design data; DD (Die-to-Die) inspection, which compares chip patterns on the same mask with each other; and SD (Single Die) inspection, which covers a single die, supporting a wide range of mature process nodes.
A small footprint and easy maintenance support stable operation. It is used for particle and quality inspection in mask manufacturing and for incoming and periodic quality inspection of masks at wafer fabs.
Key features
- DDB, DD and SD inspection modes
- Supports mature nodes
- Easy maintenance
Applications
- Mask inspection for mature nodes
Other mask inspection equipment
- MASK DR-SEM E5620 · Advantest
- ABICS E120 · Lasertec
- ABICS E320 · Lasertec
- ACTIS A150 · Lasertec
- ACTIS A200HiT series · Lasertec
- ACTIS A300 series · Lasertec
- BASIC series · Lasertec
- MAGICS M6750 / M6751 · Lasertec
More from Lasertec
- BGM300 · TSV formation equipment
- BIM300 · Surface profilers
- CIEL series · Macro inspection equipment
- CIRIUS series · Defect inspection equipment
- EZ300 · Macro inspection equipment
- GALOIS211 · Crystal defect inspection equipment
- LX series · Macro inspection equipment
- MAGICS M5640 · Wafer substrate inspection equipment
Sources
Last updated: October 23, 2026