NSR-S333F
Nikon's ArF (dry) scanner built on the ArF immersion scanner platform. It combines 300 wafers per hour or more with MMO of 4 nm or less.
Maker: Nikon · Official product page
Specifications
| Light source and NA | ArF dry (193 nm), 0.92 |
|---|---|
| Resolution | 65 nm or less |
| Overlay accuracy | MMO 4 nm or less |
| Throughput | 300 wafers per hour or more (96 shots) |
Specifications as published by the maker. See the sources below.
Overview
NSR-S333F is Nikon's ArF (dry) scanner. It combines the optics of earlier ArF scanners with the platform of NSR-S636E, Nikon's top ArF immersion scanner, raising productivity and overlay accuracy. It supports fine patterning of a wide range of devices, including logic, memory and image sensors.
Faster wafer and reticle stages achieve throughput of 300 wafers per hour or more (300 mm, 96 shots), and more stable operation raises productivity to about 1.5 times that of the earlier NSR-S322F.
It carries on the proven optics of NSR-S322F and improves wafer alignment measurement, reticle stage measurement and autofocus to achieve overlay accuracy of MMO 4 nm or less, the best in the industry for ArF scanners (as of September 2025, according to Nikon). It has Bird's Eye Control, which measures the stage from directly above with encoders; Stream Alignment, with straight-line AF and a 5-eye FIA; and Modular2 Structure, which modularizes the tool unit by unit.
Key features
- 300 wafers per hour or more
- About 1.5 times the productivity of NSR-S322F
- MMO of 4 nm or less
- Streamlign Platform
Applications
- Fine patterning for logic, memory and image sensors
Other duv lithography systems
- FPA-3030EX6 · Canon
- FPA-6300ES6a · Canon
- FPA-6300ESW · Canon
- NSR-S215D · Nikon
- NSR-S220D · Nikon
- NSR-S322F · Nikon
- NSR-S625E · Nikon
- NSR-S635E · Nikon
More from Nikon
- AMI-5700 · Macro inspection equipment
- DSP-100 · Laser direct imaging systems
- Litho Booster · Overlay metrology
- NSR-2205iL1 · i-line steppers
- NSR-S636E · DUV lithography systems
- NSR-SF155 · i-line steppers
- OPTISTATION-3200 · Macro inspection equipment
Sources
Last updated: October 23, 2026