SU-3200
SCREEN's single-wafer cleaning system. It carries 12 chambers in 3 levels × 4 towers and processes up to 800 wafers per hour.
Maker: SCREEN Holdings · Official product page
Specifications
| Type | Single wafer |
|---|---|
| Chamber configuration | 12 chambers (3 levels × 4 towers) |
| Throughput | Up to 800 wafers per hour |
| Key technologies | APAC super-clean technology, DDI chemical supply |
Specifications as published by the maker. See the sources below.
Overview
SU-3200 is a single-wafer cleaning system from SCREEN Semiconductor Solutions. It carries 12 chambers in a structure of 3 levels × 4 towers, and an even faster transfer system than earlier tools achieves throughput of up to 800 wafers per hour. Productivity per unit of floor area is also much higher.
Chambers and fluid units are integrated, and the fluid units use a tray structure that makes specification changes and maintenance easier. The chemical supply system sits at the back of the tool, shortening the distance from supply to wafer and improving process control. Two types are available: DDI (Dynamic Direct Injection) and cabinet type.
It carries APAC super-clean technology for next-generation processes. Chamber volume is about 1/3 of earlier tools for better atmosphere replacement, and SCREEN's own technologies such as ABG, which evens out FFU downflow, APN, which prevents watermarks after drying, and ASP, which suppresses splashing, create a clean processing environment.
Key features
- 12 chambers (3 levels × 4 towers), up to 800 wafers per hour
- Two chemical supply systems: DDI and cabinet
- APAC super-clean technology (ABG, APN, ASP)
Applications
- Single-wafer wet cleaning of advanced devices
Other wet cleaning equipment
- CELLESTA™-i · Tokyo Electron (TEL)
More from SCREEN Holdings
- CW-2000 · Batch wafer cleaning equipment
- DR-8000 · Mask dimension and flatness metrology
- DT-3000 (SOKUDO DUO) · Coater/developers
- DW-3100 · Laser direct imaging systems
- FC-3100 · Batch wafer cleaning equipment
- FC-821L · Batch wafer cleaning equipment
- LA-3100 · Laser annealing equipment
- RE-3500 · Ellipsometers
Sources
Front-end equipment: more products
Last updated: October 23, 2026