Final test equipment
Prexa™ SDP
TEL's prober for testing singulated devices. It has its own temperature control for high-heat devices.
Specifications
| Target | Singulated devices (2 × 2 to 100 × 100 mm) |
|---|---|
| XY accuracy | ±1.5 µm |
| Probing load | 500 kg |
Specifications as published by the maker. See the sources below.
Overview
Prexa SDP (Singulated Device Prober) is Tokyo Electron's (TEL) test system for singulated devices. It combines the many applications and reliable platform built up with Prexa and other wafer probers with TEL's own temperature control technology for high-heat devices.
It handles singulated devices from 2 × 2 mm to 100 × 100 mm, with reliable device transfer and accurate sorting of KGD (known good die).
It uses a linear motor stage, with XY probing accuracy of ±1.5 µm and a probing load of 500 kg.
Key features
- Test of singulated devices
- Temperature control for high-heat devices
- Accurate KGD sorting
Applications
- KGD sorting for chiplets and advanced packages
Other final test equipment
- 7038 System-Level Test System · Advantest
- T2000 · Advantest
- DIS100 · DISCO
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Sources
Final test equipment
Last updated: October 23, 2026